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Analysis of a Tunable Piezoelectric Resonator Using Interdigitated Electrodes

[+] Author Affiliations
Amanda A. Frederick, Hsin-Hua Hu, William W. Clark

University of Pittsburgh

Paper No. IMECE2005-80446, pp. 461-467; 7 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Design Engineering, Parts A and B
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Design Engineering Division
  • ISBN: 0-7918-4215-0 | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


The use of an interdigitated electrode configuration for tunable MEMS resonators is investigated. The tuning concept utilizes a shunt capacitor concept based on the fact that the mechanical compliance (stiffness) of the system is a function of both the mechanical properties and the electromechanical coupling of the piezoelectric element. Since the electromechanical coupling is dependant on the electrical impedance of the piezoelectric element and its shunt circuit, the circuit conditions applied to the piezoelectric tuning element can be varied in such a way as to tune the vibrational frequency of the resonator [1]. By utilizing an interdigitated electrode design to elicit the d33 response of the piezoelectric, a greater electromechanical coupling is achievable, corresponding to a wider range of tunability. In this paper, a model of the resonator is presented and then used in a study to determine the parameters which result in the highest range of tunability for the resonator.

Copyright © 2005 by ASME
Topics: Electrodes



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