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Repetitive Control for an Electrostatic Microbridge Actuator

[+] Author Affiliations
Haiyu Zhao, Christopher D. Rahn

Pennsylvania State University

Huseyin Canbolat

Mersin University

Paper No. IMECE2005-80019, pp. 453-460; 8 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Design Engineering, Parts A and B
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Design Engineering Division
  • ISBN: 0-7918-4215-0 | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Electrostatic microactuators are used extensively in MEMS sensors, RF switches, and microfluidic pumps. Due to high bandwidth operation, however, reduction of residual vibration using feedback control is diffcult to implement. This paper designs, proves stability, and simulates a feedforward repetitive controller for an electrostatic microbridge. Squeeze film damping ensures boundedness of the distributed transverse displacement. Offline processing using repetitive control algorithm updates a waveform generator’s parameters based on measured response to reduce errors between the desired and actual displacement distribution. Simulations show a 36% reduction in midspan overshoot.

Copyright © 2005 by ASME



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