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Hydrodynamic Loading of Vibrating Micro-Cantilevers

[+] Author Affiliations
Sudipta Basak, Arvind Raman, Suresh V. Garimella

Purdue University

Paper No. IMECE2005-80007, pp. 443-452; 10 pages
doi:10.1115/IMECE2005-80007
From:
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Design Engineering, Parts A and B
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Design Engineering Division
  • ISBN: 0-7918-4215-0 | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME

abstract

The hydrodynamic loading on silicon microcantilevers vibrating in different fluids close to (finite gap) and away from (infinite gap) a surface is analyzed numerically. Analytical techniques available to predict the hydrodynamic loading are restricted to simple cantilever geometries in fluids of infinite extent and are inaccurate for the higher modes of vibration. In this paper a finite element model developed in ADINA 8.1 (a fluid-structure interaction software, [1]) is used to overcome the shortcomings of the analytical models. Selective modal excitation of the cantilever in a fluid yields the corresponding modal frequency and damping factor. The numerical model benchmarks favorably with previously published experimental and analytical results. Detailed numerical analyses are performed in ADINA for variable gap lengths for a rectangular microcantilever for the first and second bending modes and the first torsional mode. Different cantilever geometries are also investigated. The results expose the physics of dissipation in the surrounding fluid and are expected to be of immediate interest to the Atomic Force Microscopy (AFM) and microcantilever biosensor communities.

Copyright © 2005 by ASME

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