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Synthesis of Nanocomposites by Ballistic Impaction of Nanoparticles

[+] Author Affiliations
R. Mukherjee, W. M. Mook, J. Hafiz, X. Wang, W. W. Gerberich, J. V. R. Heberlein, P. H. McMurry, S. L. Girshick

University of Minnesota, Minneapolis, MN

Paper No. NANO2005-87036, pp. 69-70; 2 pages
  • ASME 4th Integrated Nanosystems Conference
  • Design, Synthesis, and Applications
  • Berkeley, California, USA, September 12–14, 2005
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4208-8 | eISBN: 0-7918-3771-8
  • Copyright © 2005 by ASME


We are investigating ballistic impact assembly of nanoparticles to form a new class of materials for superhard coatings and micromolded MEMS parts. Nanoparticles are generated by dissociating vapor-phase reactants injected downstream of a thermal plasma and expanding the resultant flow through a converging nozzle into a low-pressure chamber. The nanoparticle-laden gases achieve hypersonic velocities due to the pressure difference between the reaction region (450 torr) and the low-pressure chamber (∼2 torr). Particles are deposited by one of two processes: (a) by placing a substrate 20mm downstream of the flow, which results in a bow shock at the substrate and high impact velocities (calculated to be over 2000 m/s for a 20 nm SiC particle): termed as high-rate deposition, (b) by focusing the particles into a tight beam (width of ∼35 (μm) using aerodynamic lenses, and subsequent impaction on a translating substrate: termed as focused beam deposition. Thus far, nanoparticle deposits consisting of combinations of Si, Ti, C and N have been explored.

Copyright © 2005 by ASME



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