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Novel Piston Motion Opto-Mechanical Sensor for Nanoscale Motion Detection

[+] Author Affiliations
Si-Hyung “Shawn” Lim, Roberto Horowitz, Arun Majumdar

University of California at Berkeley, Berkeley, CA

Paper No. NANO2005-87077, pp. 27-28; 2 pages
  • ASME 4th Integrated Nanosystems Conference
  • Design, Synthesis, and Applications
  • Berkeley, California, USA, September 12–14, 2005
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4208-8 | eISBN: 0-7918-3771-8
  • Copyright © 2005 by ASME


To increase the sensitivity of a micromechanical structure to temperature (in thermal sensing) and surface stress (in biochemical sensing) change, a novel Flip-Over-Bimorph (FOB) structure has been proposed. For detecting physically induced nanoscale motion, the operation of a piston motion optomechanical sensor using the FOB design has been demonstrated. The piston motion opto-mechanical sensor has a symmetric structure such that the structural deflection is converted into a linear displacement of a reflecting surface, which is used for optical interferometry. Through the optical measurement setup using the He-Ne laser and CCD, light intensity changes for chip temperature changes are measured, and the thermo-mechanical sensitivity of the designed sensor is 180 nm/K.

Copyright © 2005 by ASME



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