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Amorphous Carbon Thin Films for Interfaces in MEMS

[+] Author Affiliations
K. Malyska, Zygmunt Rymuza, Lukasz Ratajczyk

Warsaw University of Technology, Warsaw, Poland

Ali Erdemir

Argonne National Laboratory, Argonne, IL

Sergey A. Chizhik

Belorussian Academy of Sciences, Minsk, Belarus

Paper No. WTC2005-63147, pp. 723-724; 2 pages
  • World Tribology Congress III
  • World Tribology Congress III, Volume 2
  • Washington, D.C., USA, September 12–16, 2005
  • Conference Sponsors: Tribology Division
  • ISBN: 0-7918-4202-9 | eISBN: 0-7918-3767-X
  • Copyright © 2005 by ASME


Friction and nanoscratch tests were performed on amorphous carbon thin films deposited on silicon. The effect of process and conditions on CVD deposited films was studied. Coefficient of friction between the films was estimated by using a special oscillating microtribometer. The lateral force and maximum depth of scratching were measured during nanoscratch tests. The comparison of tribological behavior of the tested films is presented and discussed.

Copyright © 2005 by ASME



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