Full Content is available to subscribers

Subscribe/Learn More  >

Single Asperity Atomic Force Microscope Studies of the CMP of Silicate Glasses

[+] Author Affiliations
Stephen C. Langford, Forrest Stevens, J. Thomas Dickinson

Washington State University, Pullman, WA

Paper No. WTC2005-63932, pp. 451-452; 2 pages
  • World Tribology Congress III
  • World Tribology Congress III, Volume 2
  • Washington, D.C., USA, September 12–16, 2005
  • Conference Sponsors: Tribology Division
  • ISBN: 0-7918-4202-9 | eISBN: 0-7918-3767-X
  • Copyright © 2005 by ASME


The Atomic Force Microscope (AFM) allows one to examine the effects of applying highly localized stress to a surface. In the presence of solutions, tribochemical wear can be investigated. We present results of fundamental studies of the simultaneous application of chemical agents and mechanical stress involving a model single asperity and a solid surface. We show the consequences of combining highly localized mechanical stress (due to contact with the AFM tip) and exposure to aqueous solutions of known pH. The experiment simulates many features of a single particle-substrate-slurry interaction in CMP. We show that linear scans and rastered scans display significantly different material removal rates. Quantitative models are presented to explain the observed nanometer-scale surface modifications. This work complements recent observations of tip-induced wear and growth in a number of inorganic surfaces in aqueous solution.

Copyright © 2005 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In