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Tribochemical Polishing of Aluminum Oxide in the Atmosphere of CHF3

[+] Author Affiliations
Takao Soejima, Ken’ichi Hiratsuka, Yukihiro Sakamoto

Chiba Institute of Technology, Narashino, Chiba, Japan

Katsuyuki Okubo

IP Trading Japan Company, Ltd., Tokyo, Japan

Paper No. WTC2005-64041, pp. 921-922; 2 pages
  • World Tribology Congress III
  • World Tribology Congress III, Volume 1
  • Washington, D.C., USA, September 12–16, 2005
  • Conference Sponsors: Tribology Division
  • ISBN: 0-7918-4201-0 | eISBN: 0-7918-3767-X
  • Copyright © 2005 by ASME


Fluorinated hydrocarbon has been used as lubricants on the surface of magnetic hard disk drive. This is because this compound is thermally stable. However it has been found that fluorinated hydrocarbon was degraded on the surface during friction to generate radicals1,2) . Therefore we considered that hard ceramics will be worn out in the gaseous atmosphere of fluorinated hydrocarbon by radical reactions. If the interaction of gas to ceramics is strong, we can expect that the surface will be polished through tribochemical processes. In the present paper, we investigated the characteristic of tribochemical polishing of aluminum oxide against glass in CHF3 gas atmosphere.

Copyright © 2005 by ASME
Topics: Aluminum , Polishing



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