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Selective Surface Nano/Micro-Texturing by UV Assisted Low Temperature Crystallization of Amorphous Silicon

[+] Author Affiliations
Hengyu Wang, Li Cai, Min Zou

University of Arkansas, Fayetteville, AR

Dehua Yang, Thomas Wyrobek

Hysitron, Inc., Minneapolis, MN

Paper No. WTC2005-63719, pp. 913-914; 2 pages
doi:10.1115/WTC2005-63719
From:
  • World Tribology Congress III
  • World Tribology Congress III, Volume 1
  • Washington, D.C., USA, September 12–16, 2005
  • Conference Sponsors: Tribology Division
  • ISBN: 0-7918-4201-0 | eISBN: 0-7918-3767-X
  • Copyright © 2005 by ASME

abstract

This paper presents a novel selective surface-texturing method as well as adhesion/stiction and friction studies of the selectively-textured surface. The selective surface-texturing was accomplished by ultraviolet (UV) assisted low temperature crystallization of amorphous silicon. Adhesion/stiction experiments on the nano/micro-textured and non-textured surface areas were performed using a diamond tip under controlled displacement profiles with different maximum indentation displacements. Friction experiments on the textured and non-textured surface areas were conducted using the same tip under various normal contact forces. The adhesion/stiction forces and coefficients of friction (COF) of the textured surface areas were found to be much smaller than those of non-textured surface areas.

Copyright © 2005 by ASME

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