0

Full Content is available to subscribers

Subscribe/Learn More  >

Computing Separated Flows in MEMS Devices

[+] Author Affiliations
Oktay Baysal

Old Dominion University, Norfolk, VA

Alim Rustem Aslan

Istanbul Technical University, Istanbul, Turkey

Paper No. FEDSM2002-31157, pp. 1211-1218; 8 pages
doi:10.1115/FEDSM2002-31157
From:
  • ASME 2002 Joint U.S.-European Fluids Engineering Division Conference
  • Volume 1: Fora, Parts A and B
  • Montreal, Quebec, Canada, July 14–18, 2002
  • Conference Sponsors: Fluids Engineering Division
  • ISBN: 0-7918-3615-0 | eISBN: 0-7918-3600-2
  • Copyright © 2002 by ASME

abstract

Fluid flows in micro devices span the entire Knudsen (Kn) number regime. Depending on the Kn range, a full continuum or a full free-molecular analysis may be applicable. In the present study, flows in the Kn range of 10−3 to 10−1 are considered and they are modeled using a conventional Navier-Stokes solver. Its boundary conditions, however, have been modified to account for the slip velocity and the temperature jump conditions encountered in these micro-sized geometries. The computations have been performed for straight micro channels, a micro backward facing step, and a micro filter. The present results are then compared with analytical formulae and other computations available in the literature. The results indicate that the rarefaction and compressibility effects present in these micro devices have been accurately predicted. In the case of slip flow, the separation is found to occur at a higher Reynolds number compared to the corresponding no-slip flow case. As the next step of the study, micro synthetic jets will be computed and the optimal cavity actuator geometries will be sought for desired flow deflections.

Copyright © 2002 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In