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Liquid Crystal Polymer for RF MEMS Packaging

[+] Author Affiliations
Faheem F. Faheem, Y. C. Lee

University of Colorado, Boulder, CO

Paper No. IPACK2005-73442, pp. 2061-2065; 5 pages
  • ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference
  • Advances in Electronic Packaging, Parts A, B, and C
  • San Francisco, California, USA, July 17–22, 2005
  • Conference Sponsors: Heat Transfer Division and Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4200-2 | eISBN: 0-7918-3762-9
  • Copyright © 2005 by ASME


We have developed a liquid crystal polymer (LCP) encapsulation technology for RF MEMS. The RF MEMS devices are flip-chip interconnected with other circuit elements on an alumina substrate. After flip-chip device transfer, LCP is used to encapsulate the device on the substrate. This approach is similar to glob-top encapsulation used for low-cost microelectronic packaging. The effectiveness of LCP (Vectra A950) sealing has been demonstrated by monitoring the moisture level inside the package under a 100% RH environment. In addition, the LCP’s permeabilities to helium and nitrogen were measured through a standard membrane characterization setup. These permeabilities were proven to be in the same level as those of glasses used for hermetic sealing. LCP is an excellent encapsulation material for hermetic or near-hermetic packaging of RF MEMS.

Copyright © 2005 by ASME



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