0

Full Content is available to subscribers

Subscribe/Learn More  >

Characterization of Heated Atomic Force Microscope Cantilevers in Air and Vacuum

[+] Author Affiliations
Jungchul Lee, Tanya L. Wright, Mark Abel, Erik Sunden, Alexei Marchenkov, Samuel Graham, William P. King

Georgia Institute of Technology, Atlanta, GA

Paper No. IPACK2005-73456, pp. 1767-1772; 6 pages
doi:10.1115/IPACK2005-73456
From:
  • ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference
  • Advances in Electronic Packaging, Parts A, B, and C
  • San Francisco, California, USA, July 17–22, 2005
  • Conference Sponsors: Heat Transfer Division and Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4200-2 | eISBN: 0-7918-3762-9
  • Copyright © 2005 by ASME

abstract

This paper presents characterization of heated atomic force microscope (AFM) cantilevers in air and helium, both at atmospheric pressure and in a partially evacuated environment. The cantilevers are made of doped single-crystal silicon using a standard silicon-on-insulator cantilever fabrication process. The electrical measurements show the link between the cantilever temperature-dependant electrical characteristics, electrical resistive heating, and thermal properties of the heated AFM cantilever and its surroundings. Laser Raman thermometry measures temperature along the cantilever with resolution near 1 μm and 4°C. By modulating the gaseous environment surrounding the cantilever, it is possible to estimate the microscale thermal coupling between the cantilever and its environment. This work seeks to improve the calibration and design of heated AFM cantilevers.

Copyright © 2005 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In