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The Study of the Design in Micro Modal Actuators Using the Holographic Interferometry

[+] Author Affiliations
Wei-Hsin Gau, Yuh-Chung Hu, Yen-Yi Peng

Huafan University, Shihtin, Taiwan

Paper No. IPACK2005-73333, pp. 1737-1742; 6 pages
  • ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference
  • Advances in Electronic Packaging, Parts A, B, and C
  • San Francisco, California, USA, July 17–22, 2005
  • Conference Sponsors: Heat Transfer Division and Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4200-2 | eISBN: 0-7918-3762-9
  • Copyright © 2005 by ASME


A novel electrostatic micro modal actuator adopted the orthogonality of the mode shape of the microstructure is created. By using the design of the shape of the modal electrode, the stability of the actuator can be improved and the driving voltage can be reduced by controlling the actuated modes precisely. In the analysis in this investigation, the equations of motion considering the effect of the coupling between the flexibility and the electrostatic field of the micro actuator are developed. The modal equations derived by the modal expansion indicate that distributed electrostatic modal actuators can be realized through the constructed correctly modal electrodes and the specific excited mode. The developed electrostatic modal actuator can reduce the driven voltage and eliminate the spillover phenomenon. Since, the stiffness, the dynamic properties, and the stability of the system can be affected by the changes of the electric field, the effect of the electrostatic field and the shape of the electrode on the actuator are also investigated. The experimental modifications of the modes caused by different shapes of the actuators are examined by using the time-average Holographic interferometry. Concerning to the electrostatic modal actuator, the design concepts can be realized through the combination of the modal electrode and the design of controlling circuits. The analytical model considering the coupling effect between the structure and electrostatic field can be established in the form of the linear periodically time-varying function and the relationship between the full field mode and the driven voltage can be obtained.

Copyright © 2005 by ASME



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