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Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for MEMS Materials

[+] Author Affiliations
Jun-Hyub Park, Hyeon Chang Choi

Tongmyong University of Information Technology, Busan, Korea

Chang Seung Lee, Sung-Hoon Choa

Samsung Advanced Institute of Technology, Suwon, Korea

Man Sik Myung, Yun-Jae Kim

Korea University, Seoul, Korea

Paper No. IPACK2005-73195, pp. 1725-1730; 6 pages
  • ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference
  • Advances in Electronic Packaging, Parts A, B, and C
  • San Francisco, California, USA, July 17–22, 2005
  • Conference Sponsors: Heat Transfer Division and Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4200-2 | eISBN: 0-7918-3762-9
  • Copyright © 2005 by ASME


This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1 μm and 480 μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and −0.1514, respectively.

Copyright © 2005 by ASME



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