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Measurement of Local Residual Stress of a Flip Chip Structure Using a Stress Sensing Chip

[+] Author Affiliations
Nobuki Ueta, Hideo Miura

Tohoku University, Sendai, Miyagi, Japan

Paper No. IPACK2005-73112, pp. 1135-1140; 6 pages
  • ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference
  • Advances in Electronic Packaging, Parts A, B, and C
  • San Francisco, California, USA, July 17–22, 2005
  • Conference Sponsors: Heat Transfer Division and Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4200-2 | eISBN: 0-7918-3762-9
  • Copyright © 2005 by ASME


Local residual stress at a surface of a silicon chip mounted on a substrate using flip chip technology was measured using a stress sensor chip that was composed of 168 strain gauges of 10-μm in length. Each strain gauge was made of polycrystalline silicon films deposited on a silicon wafer. The periodic stress distribution was measured at a surface of the sensor chip between two bumps. Five gauges were aligned at a interval of 20-μm between the bumps. When the thickness of the chip was less than 200 μm, the amplitude of the stress increased drastically, as was predicted by a finite element analysis. The amplitude of the stress reached about 150 MPa, when the thickness of the chip was thinned to 50 μm. The amplitude of the stress is a strong function of the thickness of a silicon chip and the intervals of the bumps.

Copyright © 2005 by ASME
Topics: Stress , Flip-chip



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