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Variable Focal Length Microlens by Low Voltage Electrowetting on Dielectric (EWOD) Actuation

[+] Author Affiliations
Raj K. Dash, Theodorian Borca-Tasciuc

Rensselaer Polytechnic Institute, Troy, NY

Paper No. IPACK2005-73441, pp. 797-802; 6 pages
  • ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference
  • Advances in Electronic Packaging, Parts A, B, and C
  • San Francisco, California, USA, July 17–22, 2005
  • Conference Sponsors: Heat Transfer Division and Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4200-2 | eISBN: 0-7918-3762-9
  • Copyright © 2005 by ASME


This work presents a design and proposed microfabrication steps for a two-liquid variable focal length capillary microlens. The capillary lens is actuated by electrowetting on dielectric effect. The microlens is made from a dielectric liquid whereas a conducting liquid serves as one of the electrodes for the actuation. The dependence of the microlens focal length on the properties of the dielectric materials is investigated using a model for electrowetting on dielectric effect. The model indicates that low voltage actuation (<20V) is possible by adjusting the dielectric layer thickness. The effect of the microlens size on the focal length is presented. The advantages of a two-liquid capillary microlens are briefly discussed.

Copyright © 2005 by ASME



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