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Development of 1D Optical Micro Scanner Driven by Piezoelectric Actuators

[+] Author Affiliations
Takeshi Kobayashi, Jiunnjye Tsaur, Ryutaro Maeda

National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan

Paper No. IPACK2005-73431, pp. 789-792; 4 pages
  • ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference
  • Advances in Electronic Packaging, Parts A, B, and C
  • San Francisco, California, USA, July 17–22, 2005
  • Conference Sponsors: Heat Transfer Division and Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4200-2 | eISBN: 0-7918-3762-9
  • Copyright © 2005 by ASME


1D optical micro scanners driven by piezoelectric actuators have designed, simulated, fabricated and tested. The newly designed micro scanners have a structure that rotation bars, hinges and PZT cantilevers support a square mirror (1mm × 1mm). Flat-structured micro scanners have been fabricated from Pt/PZT/Pt/Ti/SiO2 /SOI(Si/SiO2 /Si) multi-layered structure through conventional MEMS micro fabrication technologies. The micro scanner driven at 10 V showed an optical scan angle of 1.5 degree for the static actuation (60 Hz) and of 13 degree for the resonant actuation (4825 Hz), respectively.

Copyright © 2005 by ASME



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