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Improving the Performance of the Micro Jet Array Air Cooling MEMS Device Using CFD

[+] Author Affiliations
Yangki Jung, R. Panneer Selvam

University of Arkansas, Fayetteville, AR

Paper No. IPACK2005-73392, pp. 545-552; 8 pages
doi:10.1115/IPACK2005-73392
From:
  • ASME 2005 Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems collocated with the ASME 2005 Heat Transfer Summer Conference
  • Advances in Electronic Packaging, Parts A, B, and C
  • San Francisco, California, USA, July 17–22, 2005
  • Conference Sponsors: Heat Transfer Division and Electronic and Photonic Packaging Division
  • ISBN: 0-7918-4200-2 | eISBN: 0-7918-3762-9
  • Copyright © 2005 by ASME

abstract

In this work ways to improve the performance of the MJA is investigated using computer modeling. Finite-difference method is used to analyze and understand the heat transfer mechanism in the MEMS based air micro-jet array (MJA) impinging cooling device. The three-dimensional Navier-Stokes (NS) equations using the compressible flow are solved. The computed temperature distribution at the bottom of the MJA is in good agreement with the experimental measurement data. To improve the heat transfer performance, an optimum model is developed. This enhances the heat removal capacity about 100% (0.5 W/cm2 °C ). The details of computer modeling and the flow visualization to understand the flow and heat transfer in the MJA are presented.   This paper was also originally published as part of the Proceedings of the ASME 2005 Heat Transfer Summer Conference.

Copyright © 2005 by ASME

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