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Cavitation in MicroElectroMechanical Systems (MEMS): Importance, Deviations From Conventional Scale, and Preliminary Results

[+] Author Affiliations
Yoav Peles, Chandan Mishra

Rensselaer Polytechnic Institute, Troy, NY

Paper No. FEDSM2005-77405, pp. 581-586; 6 pages
  • ASME 2005 Fluids Engineering Division Summer Meeting
  • Volume 2: Fora
  • Houston, Texas, USA, June 19–23, 2005
  • Conference Sponsors: Fluids Engineering Division
  • ISBN: 0-7918-4199-5 | eISBN: 0-7918-3760-2
  • Copyright © 2005 by ASME


Hydrodynamic cavitation in micro systems is a fundamental engineering problem that is poorly understood. The lack of knowledge on cavitation relevant to MEMS devices is impeding the practical realization of novel high-velocity microfluidic machines. This paper divulges differences between cavitation occurring inside micro and conventional systems, and also indicates the limited applicability of conventional knowledge to predict and understand cavitating flows in micro-domains. A detailed discussion delineating the possible reasons of such a divergence is presented in this article. Additionally, selected results obtained from preliminary experiments on cavitation in micro-domains are presented.

Copyright © 2005 by ASME



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