0

Full Content is available to subscribers

Subscribe/Learn More  >

Novel Fabrication and Testing of a Bubble-Powered Micropump

[+] Author Affiliations
Jung-Yeul Jung, Ho-Young Kwak

Chung-Ang University, Seoul, Korea

Paper No. ICMM2005-75015, pp. 349-354; 6 pages
doi:10.1115/ICMM2005-75015
From:
  • ASME 3rd International Conference on Microchannels and Minichannels
  • ASME 3rd International Conference on Microchannels and Minichannels, Part B cont’d
  • Toronto, Ontario, Canada, June 13–15, 2005
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-4185-5 | eISBN: 0-7918-3758-0
  • Copyright © 2005 by ASME

abstract

A bubble-powered micropump was fabricated and tested in this study. The micropump consists of a pair of nozzle-diffuser flow controller and a pumping chamber. The two-parallel micro line heaters were fabricated to be embedded in the silicon dioxide layer above a silicon wafer which serves as a base plate for the micropump. The pumping chamber, the pair of nozzle-diffuser unit and microchannels including the liquid inlet and outlet port were fabricated by etching through another silicon wafer. A glass wafer having two holes of inlet and outlet ports of liquid serve as upper plate of the pump. The sequential photographs of bubble nucleation, growth and collapse were visualized by CCD camera. Clearly liquid flow through the nozzle during the period of bubble growth and slight back flow of liquid at the initial period collapsing can be seen. The mass flow rate was found to be dependent on the duty ratio and the operation frequency. The mass flow rate decreases as the duty ratio increases in the micropump with either circular or square pumping chamber.

Copyright © 2005 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In