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Ink Jet Processing of Metallic Nanoparticle Suspensions for Electronic Circuitry Fabrication

[+] Author Affiliations
John B. Szczech, Constantine M. Megaridis

University of Illinois at Chicago, Chicago, IL

Jie Zhang, Daniel Gamota

Motorola Labs, Schaumberg, IL

Paper No. ICMM2003-1104, pp. 795-800; 6 pages
doi:10.1115/ICMM2003-1104
From:
  • ASME 2003 1st International Conference on Microchannels and Minichannels
  • 1st International Conference on Microchannels and Minichannels
  • Rochester, New York, USA, April 24–25, 2003
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-3667-3
  • Copyright © 2003 by ASME

abstract

A novel approach in creating circuit electrodes with features as fine as 100 μm is demonstrated using a single 38 μm diameter orifice, piezoelectrically driven print head to deposit metallic nanoparticle suspensions. The suspensions consist of gold particles of ∼20 nm diameter suspended in toluene solvent. The amount of gold nanoparticles present in the suspension is 30% wt. Inductor and capacitor electrode patterns are deposited onto a glass substrate and thermally processed at 300°C for 15 minutes to drive off the solvent and allow the nanoparticles to sinter, thereby yielding a conductive path with a resistivity of O(10−7 ) Ω m.

Copyright © 2003 by ASME

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