Full Content is available to subscribers

Subscribe/Learn More  >

Gaseous Flows in Rectangular Microchannels: Experimental Validation of a Second-Order Slip Flow Model

[+] Author Affiliations
Stéphane Colin, Pierre Lalonde, Robert Caen

Institute National des Sciences Appliquées, Toulouse, France

Paper No. ICMM2003-1052, pp. 433-440; 8 pages
  • ASME 2003 1st International Conference on Microchannels and Minichannels
  • 1st International Conference on Microchannels and Minichannels
  • Rochester, New York, USA, April 24–25, 2003
  • Conference Sponsors: Nanotechnology Institute
  • ISBN: 0-7918-3667-3
  • Copyright © 2003 by ASME


A precise analytical model for gaseous flows in microchannels is of great interest for various applications, as for example when these microchannels are parts of a complex fluidic microsystem. However, a decrease in the channel hydraulic diameter leads to an increase in the rarefaction effects. If the Knudsen number becomes higher than about 0.1, it is generally admitted that the Navier-Stokes equation, even with first-order slip flow boundary conditions, are no longer valid. In order to keep an analytical model for higher Knudsen numbers, a resolution of the Navier-Stokes equation with second-order boundary conditions has been proposed in rectangular microchannels. An experimental setup has been designed for the measurement of gaseous microflows under controlled temperature and pressure conditions. Data relative to nitrogen and helium flows through rectangular microchannels are presented and analyzed. The microchannels have been etched by DRIE in silicon and closed with Pyrex by anodic bounding. Their depths range from 4.5 to 0.5 μm, with aspect ratios from 1 to 9%. It is shown that for aspect ratios higher than 1%, a plane flow model is no longer accurate, and that the proposed rectangular model should be used. The different sources of uncertainty that could occur during the experiments are discussed. A method is proposed to eliminate the principal one, that is the uncertainty when measuring the dimensions of the microchannel cross-section. Theoretical and experimental mass flow rates are compared, and it is shown that in rectangular microchannels, the second-order model is valid up to about 0.25, whereas the first-order model is no longer accurate for Knudsen numbers higher than 0.05. The best fit has been found for a tangential momentum accommodation coefficient σ = 0.93 , both with helium and nitrogen. Perspectives of this work are also presented.

Copyright © 2003 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In