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Planar Microfabricated Check Valves Utilizing Large Compliance of PDMS

[+] Author Affiliations
Bozhi Yang, Qiao Lin

Carnegie Mellon University

Paper No. IMECE2005-81958, pp. 737-740; 4 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


This paper presents three types of planar check valves that uniquely exploit the large compliance of simple PDMS structures. The micro check valves consist of a thin compliant flap and a rigid stopper embedded in a microchannel. The flap is perpendicular to the flow and lies near the stopper, forming a restricted fluid path inside the channel. In particular, a novel “zero flap-stopper gap” valve design was proposed and fabricated using a special technique, in which the flap and stopper are in contact naturally forming a normally-closed device with high diodicity. Testing results show that the check valves can achieve a diodicity up to 105. The check valves can be fabricated using the standard replica molding technique from PDMS, and thus are highly amenable to integration with other PDMS-based microfluidic systems.

Copyright © 2005 by ASME



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