0

Full Content is available to subscribers

Subscribe/Learn More  >

Characterization and Modeling of Thermal Buckling in Eccentrically Loaded Microfabricated Nickel Beams for Adaptive Cooling

[+] Author Affiliations
Matthew McCarthy, Nicholas Tiliakos, Vijay Modi, Luc Frechétte

Columbia University

Paper No. IMECE2005-81415, pp. 689-698; 10 pages
doi:10.1115/IMECE2005-81415
From:
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME

abstract

The design, fabrication and testing of micromachined nickel beams buckling under thermal loading will be presented in this paper. The focus will be on characterizing key design parameters important to the implementation of electroplated nickel beams as the actuation mechanism in a thermally adaptive microvalve. An analytical model of the thermal buckling phenomena has been developed and validated with test results from electroplated nickel beams with slight eccentricities. Highly nonlinear deflection versus temperature curves were predicted by the closed form model and match well with experimental measurements. Buckling deflections of more than 50μm were achieved at actuation temperatures under 100°C. The nickel beam fabrication process will be presented, as well as various fabrication related issues impacting the actuation capabilities of the beams.

Copyright © 2005 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In