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Modeling and Experimentation of Viscous Damping for LIGA Structures

[+] Author Affiliations
Baris Yagci, Tikeswar Naik

Carnegie Mellon University

Wei-Yang Lu

Sandia National Laboratories

Paper No. IMECE2005-83027, pp. 601-606; 6 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


LIGA (from German, LIthographie, Galvanoformung und Abformung) is one of the most viable manufacturing techniques for creating precise micro-mechanical components. Due to their monolithic construction, LIGA structures lack the most important contributor to energy dissipation; the joints. In shock and vibration environments, the low damping capacity can cause functional and structural failures. As a means of increasing the energy dissipation of LIGA structures, this paper experimentally investigates coupled fluid-structural dynamics of LIGA structures when submersed into fluids. The experiments are conducted by base-exciting a rectangular cross-section cantilever LIGA beam with a shaker, and measuring the response through a laser Doppler vibrometer. The paper also evaluates simple fluid dynamics models from the literature for their effectiveness in capturing the experimentally-observed behavior.

Copyright © 2005 by ASME
Topics: Damping , Modeling



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