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A Room Temperature Hydrogen Sensor With High Sensitivity and Selectivity Using Nanocrystalline Semiconductor Particles

[+] Author Affiliations
Peng Zhang, Satyajit Shukla, Hyoung J. Cho, Sudipta Seal

University of Central Florida

Larry Ludwig

Kennedy Space Center

Paper No. IMECE2005-82357, pp. 579-582; 4 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Micro hydrogen sensor with interdigitated electrodes and indium doped nanopolycrystalline SnO2 particles was fabricated and tested. Giant sensitivity as high as 105 with good repeatability and recovery was observed. The sensor showed an excellant selectivity of hydrogen (H2 ) sensing over helium (He).

Copyright © 2005 by ASME



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