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Piezoelectric Thin Film AlN Annular Dual Contour Mode Bandpass Filter

[+] Author Affiliations
Philip J. Stephanou, Gianluca Piazza, Carolyn D. White, Muthu B. J. Wijesundara, Albert P. Pisano

University of California at Berkeley

Paper No. IMECE2005-81679, pp. 517-523; 7 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


The following work presents the analytical, numerical and experimental characterization of a novel piezoelectric Aluminum Nitride MEMS bandpass filter. In contrast to multipole filters employing distinct mechanically or electrically coupled resonator building blocks, the passband of the device in the present work is defined by the proximity of two natural contour modes of vibration in a single annular resonator. The proposed implementation, albeit currently limited to dual-pole filters, results in smaller form factors and reduces device sensitivity to across wafer fabrication tolerances.

Copyright © 2005 by ASME
Topics: Thin films , Filters



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