Full Content is available to subscribers

Subscribe/Learn More  >

A Fully-Compliant, In-Plane Rotary, Bistable Micromechanism

[+] Author Affiliations
Rajesh Luharuka, Peter J. Hesketh

Georgia Institute of Technology

Paper No. IMECE2005-81220, pp. 481-485; 5 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


A fully compliant bistable micromechanism (hereafter identified as an in-plane rotary bistable micromechanism or IPRBM) is designed to accomplish in-plane rotary motion with two stable positions. The micromechanism consists of four individually bistable mechanisms arranged in a cyclically symmetric geometry about a central proof mass. This class of bistable mechanism can be used in gate valve, optical shutter, and other switching applications. Two classes of IPRBMs are investigated in this paper. The bistable micromechanism size is less than 1 mm and fabricated by electroplating a soft magnetic material — Permalloy (80% Ni, 20% Fe) in a positive photoresist mold. Minimum feature size in the IPRBM, which corresponds to the width of flexible linkages, is 4 μm. The fabricated IPRBMs have been tested for their force-deflection response using an image based force sensing method. The test results were then compared with the simulated results obtained from a finite element model of the IPRBM. The IPRBM are shown to reversibly undergo 10 to 20 degrees of in-plane rotation and required a maximum torque of 1 to 2 μNm depending on the design. The experimental results showed good overall agreement with the design. A comparison within and between the two classes of IPRBM have been completed for three different design cases between which the tether width and aspect ratio was varied. The study showed a relative advantage of slender tethers with high aspect ratio in minimizing out-of-plane deflection. Also, the radial separation of the individual bistable mechanisms is important.

Copyright © 2005 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In