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Mechanical Testing of Freestanding Nano-Films Using a Novel Finite Diameter Tip MEMS-Based Testing Machine

[+] Author Affiliations
Zayd C. Leseman, Zuhaib Sheikh

University of Illinois at Urbana-Champaign

Thomas J. Mackin

California Polytechnic State University

Matthew Begley

University of Virginia

Paper No. IMECE2005-80987, pp. 473-477; 5 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


We present a novel experimental method for measuring the mechanical properties of nano-thickness materials using a freestanding membrane test. Specially fabricated axisymmetric freestanding membranes are centrally deflected using a spherical indenter attached to a custom-designed MEMS load cell. Experiments on freestanding films allows us to determine directly the mechanical properties of the films, over a broad range of length scales, without the confounding effects of a substrate.

Copyright © 2005 by ASME



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