0

Full Content is available to subscribers

Subscribe/Learn More  >

A Novel Approach for Batch Fabrication of Bifunctional AFM-SECM Probes

[+] Author Affiliations
Heungjoo Shin, Peter J. Hesketh, Christine Kranz, Douglas A. Rudolph, Boris Mizaikoff

Georgia Institute of Technology

Paper No. IMECE2005-79424, pp. 383-387; 5 pages
doi:10.1115/IMECE2005-79424
From:
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME

abstract

This paper presents a novel batch fabrication process for manufacturing bifunctional Scanning Electrochemical-Atomic Force Microscopy (AFM-SECM) probes with a recessed integrated ring electrode. The presented tip fabrication procedure enables the integration of a micro ring electrode at a precisely defined distance above the apex of the AFM tip. The electroactive area integrated into a scanning probe tip allows obtaining electrochemical data independently and separated from the topographical image. The tip fabrication is based upon batch processing, which provides bifunctional scanning probe tips on a wafer scale at low cost with high processing reproducibility and uniformity. Electrochemical characterization of an AFM tip-integrated ring electrode and combined electrochemical and topographical imaging using the bifunctional probe are demonstrated in this study.

Copyright © 2005 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In