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A Novel Approach for Batch Fabrication of Bifunctional AFM-SECM Probes

[+] Author Affiliations
Heungjoo Shin, Peter J. Hesketh, Christine Kranz, Douglas A. Rudolph, Boris Mizaikoff

Georgia Institute of Technology

Paper No. IMECE2005-79424, pp. 383-387; 5 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


This paper presents a novel batch fabrication process for manufacturing bifunctional Scanning Electrochemical-Atomic Force Microscopy (AFM-SECM) probes with a recessed integrated ring electrode. The presented tip fabrication procedure enables the integration of a micro ring electrode at a precisely defined distance above the apex of the AFM tip. The electroactive area integrated into a scanning probe tip allows obtaining electrochemical data independently and separated from the topographical image. The tip fabrication is based upon batch processing, which provides bifunctional scanning probe tips on a wafer scale at low cost with high processing reproducibility and uniformity. Electrochemical characterization of an AFM tip-integrated ring electrode and combined electrochemical and topographical imaging using the bifunctional probe are demonstrated in this study.

Copyright © 2005 by ASME



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