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An Analysis of Elastic Deformation Induced by Gradient Residual Stresses in Multilayered MEMS Structures

[+] Author Affiliations
Shusen Huang, Xin Zhang

Boston University

Paper No. IMECE2005-81383, pp. 359-362; 4 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


This paper presents an elastic analysis of a multilayered system due to the gradient residual stresses. Given the residual strain distribution, the elastic deformation of a multilayered structure can be determined using the derived general solution. Bimaterial cantilevers are widely used as sensing and actuation components in MEMS devices. Assuming the residual strain in each layer of such a bimaterial cantilever is linearly distributed, the error induced by evaluating its curvature without the gradient item is studied. The distributions of normalized deformation strain and real strain in a bilayered cantilever is also given. The positions of deformation plane and neutral plane in that cantilever as well in three more cases are summarized. The presented results in this paper shows that missing the gradient residual stress in multilayered systems may lead to serious misunderstanding of the deformation, and therefore, the model built in this paper may help in the development of multilayered structures in MEMS devices.

Copyright © 2005 by ASME



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