0

Full Content is available to subscribers

Subscribe/Learn More  >

A Fracture Mechanics Model for the Repair of Microcantilevers by Laser Induced Stress Waves

[+] Author Affiliations
Zayd C. Leseman, Sai Koppaka

University of Illinois at Urbana-Champaign

Thomas J. Mackin

California Polytechnic

Paper No. IMECE2005-81000, pp. 353-357; 5 pages
doi:10.1115/IMECE2005-81000
From:
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME

abstract

A fracture mechanics model was developed, and experimentally verified, to model stress wave repair of stiction-failed microcantilevers. This model allows us to predict accurately the number of laser pulses, at a specific fluence and wavelength, required to fully repair stiction-failed microcantilevers. The proposed fracture mechanics model includes the strain energy stored in a stiction-failed microcantilever and the strain energy supplied by laser induced stress-waves propagating in the material. The ‘unstuck’ portion of the microcantilever is modeled as a crack so that crack growth reduces the stiction-failed length of the microcantilever. A full range of experiments have been performed to validate the model. Experiments using laser fluences ranging from 0.5 kJ/m2 – 45 kJ/m2 at two different wavelengths have been performed. The experiments are in good agreement with the model predictions. Additionally we have identified practical ranges for irradiation, including a lower bound fluence below which repair is impractical, and an upper bound above which damage to the substrate and microcantilevers occurs.

Copyright © 2005 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In