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Modeling and Vibration Analysis of Vibrating Beam Microgyroscopes Under Longitudinal Rotation of the Support

[+] Author Affiliations
Mehdi Esmaeili, Mohammad Durali

Sharif University of Technology

Nader Jalili

Clemson University

Paper No. IMECE2005-80633, pp. 345-351; 7 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


This paper discusses the effects of substrate motions on the performance of a microgyroscope modeled as a suspended beam with a tip mass. These motions can be either along or around the three axes. Using the Extended Hamilton’s Principle, the equations of motion are derived. In these equations, the effects of beam distributed mass, tip mass, angular accelerations, centripetal and coriolis accelerations are well apparent. The effect of electrostatic forces inducing the excitation vibrations are considered as linear functions of beam displacement. The response of the system to different inputs is studied and the system sensitivity to input parameter changes are examined. Finally, the sources of error in the measurement of input rotational rate are investigated and identified. The study demonstrates the importance of errors caused by cross axes inputs on the gyroscope output measurements.

Copyright © 2005 by ASME



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