Full Content is available to subscribers

Subscribe/Learn More  >

Numerical and Experimental Analysis of a Nonlinear Vibrating MEMS

[+] Author Affiliations
Francesco Braghin, Elisabetta Leo, Ferruccio Resta

Politecnico di Milano

Paper No. IMECE2005-81014, pp. 253-261; 9 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


When significantly displacing a proof mass, the nonlinear hardening characteristic of the supporting beams becomes visible. Thus, the resonance peak of the structure is no longer vertical but bends towards the higher frequencies. This property is useful to easily synchronise sense and drive resonances thus increasing the sensibility of the MEMS gyroscope. Through a test structure designed to investigate the high deformation range of the supporting beams, its nonlinear vibrations were investigated both experimentally and numerically. It is shown that a simple nonlinear lumped parameter model could be sufficient to schematise the system and that a semi-analytical integration method allows to quickly determine both stable and unstable branches of the system’s dynamic response and to design the supporting structure.

Copyright © 2005 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In