Full Content is available to subscribers

Subscribe/Learn More  >

Direct Micro Mechanical Testing Method for MEMS Materials

[+] Author Affiliations
Bo Li, Quanfang Chen

University of Central Florida

Paper No. IMECE2005-80289, pp. 229-232; 4 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Mechanical properties of MEMS materials are crucial for MEMS performance and reliability. Micro scale mechanical test has been challenging to MEMS community, due to the difficulties in handling micro scale specimens. In this article, a novel micro mechanical tensile testing method has been developed in combining a stiff microscale specimen developed with MTS Tytron Micro Force Tester. The advantages of this method include that it is a standard direct test of micro machined specimens, simple boundary conditions, and easy specimen handling/mounting in characterization. A novel specimen with micro features has been designed and fabricated for the direct mechanical testing. The specimen consists of three micro beams in parallel. The width of the center beam is 40 μm and the outer two beams’ width is 90 μm. The length of all three beams is 4 mm long. An optimized design has been achieved with finite element analysis, which shows that 98% of the total deformation occurs on the beams’ gage length. The stress is uniformly distributed over the three beams with a difference less than 0.5% among them. Both UV-LIGA fabricated nickel and SU-8 specimens have been tested. The UV-LIGA fabricated nickel has fracture strength of 1000±70 MPa and the results of SU-8 show a brittle behavior with fracture strength of 48±3 MPa.

Copyright © 2005 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In