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Measurement of the Size Effect in the Micron-Sized Structures Using the AFM

[+] Author Affiliations
Seong-Hyun Ko, Hun-Kee Lee, Jun-Soo Han, Hyun Chul Park

Pohang University of Science and Technology

Paper No. IMECE2005-80184, pp. 209-212; 4 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Purpose of this study is to investigate the size-dependent mechanical properties in micron scale medium. Theories such as the couple stress theory and strain gradient theory explain that the deformation in the micron scale is dependent upon the size of the medium. Specimens of the cantilever type, bridge type and paddle type beam that have thickness of 900, 1000 and 1200 nm and width of 20, 30 and 50 μm were fabricated by the MEMS technique. We carried out the bending and torsion test to measure the mechanical properties such as the young’s modulus, yield strength and torsional rigidity using the AFM (Atomic Force Microscopy). In addition, the mechanical test for the AAO (Anodic Aluminum Oxide) structure was carried out.

Copyright © 2005 by ASME



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