Full Content is available to subscribers

Subscribe/Learn More  >

Vibrational Characteristics of Micro Beams

[+] Author Affiliations
Oladipo Onipede, Jr., Amir Khalilollahi, Lisa Buziewicz

Pennsylvania State University at Erie

Ilya Avdeev


Paper No. IMECE2005-79560, pp. 199-200; 2 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Several high frequency MEMS devices such as resonators and filters can be modeled as electrostatically driven micro-beams. While their static structural response depends solely on the magnitude of the applied voltage and their elastic stiffness, their dynamic response also depends on their mass, damping properties and the applied voltage frequency. In designing these devices, critical parameters must include the maximum voltage, voltage frequency and the natural frequency of the system. Even though the electrostatic force developed by the voltage is non-linear, the system can be modeled as a harmonic system due to the periodic nature of the response. Results from a non-linear structural-electrostatic dynamic model show the importance of the dynamic properties and the non-linear electrostatic force. The results show significantly lower limiting voltages, especially when the driving voltage is close to the natural frequency of the system. The effect of damping is also addressed.

Copyright © 2005 by ASME
Topics: Microbeams



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In