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Direct-Write Fabrication of Microchannel in Epoxy Matrix

[+] Author Affiliations
Ebrahim Ghafar-Zadeh, Mohamad Sawan, Daniel Therriault

École Polytechnique de Montréal

Paper No. IMECE2005-82905, pp. 189-190; 2 pages
doi:10.1115/IMECE2005-82905
From:
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME

abstract

This paper describes the fabrication of microchannels by direct-write assembly and their integration into CMOS circuit technologies. A robotic apparatus was used to deposit a fugitive ink filament on glass and CMOS chip substrates. An epoxy and a nanocomposite matrix were both used to enclose the ink which was subsequently removed under heat and pressure in order to form a microchannel. Here, we demonstrate the fabrication of a microchannel by direct-write assembly on top of a CMOS chip for potential laboratory-on-chip applications such as bioparticle detection and manipulation.

Copyright © 2005 by ASME

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