Full Content is available to subscribers

Subscribe/Learn More  >

Contact Thermal Lithography

[+] Author Affiliations
A. Schmidt, X. Chen, G. Chen

Massachusetts Institute of Technology

Paper No. IMECE2005-81748, pp. 157-159; 3 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Contact thermal lithography is a method for fabricating patterns based on thermal effects. In contrast to photolithography, where resolution is limited by the wavelength of light used in the exposure process, thermal lithography is limited by thermal diffusion. A traditional metal-glass photomask is brought into contact with a wafer coated with a thermally sensitive polymer. The mask-wafer combination is flashed briefly with high intensity light, causing the metal features to heat up and conduct heat locally to the polymer. The polymer cross-links due to the temperature rise and forms an image of the mask. Simple models are presented to analyze the heating process and select appropriate geometries and heating times. In addition, an experimental version of a contact thermal lithography system has been constructed. Early results from this system are presented, along with suggestions for future development.

Copyright © 2005 by ASME



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In