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Development of Membrane Micro Embossing (MeME) Process for Self-Supporting Polymer Membrane Microchannel

[+] Author Affiliations
Masashi Ikeuchi, Koji Ikuta

Nagoya University

Paper No. IMECE2005-80782, pp. 133-136; 4 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


In this work, we have successfully fabricated self-supporting polymer membrane microchannels with width of 50μm, depth of 50μm, and wall thickness of ~5μm. To fabricate this self-supporting polymer membrane microchannel, we have developed novel micro fabrication process named “membrane micro embossing (MeME)”. In this process, a thin (~μm) thermoplastic polymer membrane set between a master mold and a deformable support substrate is heated to glass transition temperature, and pressed to fit the membrane onto the mold surface. By heat-sealing the embossed membrane with another planar membrane, we can fabricate sealed membrane microchannels. This membrane microchannel surrounded by only thin membrane walls will provide a powerful platform for micro-scale biological and chemical analysis.

Copyright © 2005 by ASME



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