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Optical Characterization of a Bimorph Deformable Mirror

[+] Author Affiliations
David A. Horsley, Hyunkyu Park, Chih-Wei Chuang, Sophie P. Laut, John S. Werner

University of California at Davis

Paper No. IMECE2005-81836, pp. 101-105; 5 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


This paper reports the results of interferometric characterization of a bimorph deformable mirror (DM) designed for use in an adaptive optics (AO) system. The natural frequencies of this DM were measured up to 20 kHz using both a custom stroboscopic phase-shifting interferometer as well as a commercial Laser Doppler Vibrometer (LDV). Interferometric measurements of the DM surface profile were analyzed by fitting the surface with mode-shapes predicted using classical plate theory for an elastically-supported disk. The measured natural frequencies were found to be in good agreement with the predictions of the theoretical model.

Copyright © 2005 by ASME
Topics: Mirrors



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