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Micro-Cantilever Based Metrology Tool for Flow Characterization of Liquid and Gaseous Micro/Nanojets

[+] Author Affiliations
Jungchul Lee, Kianoush Naeli, Hanif Hunter, John Berg, Tanya Wright, Christophe Courcimault, Nisarga Naik, Mark Allen, Oliver Brand, Ari Glezer, William King

Georgia Institute of Technology

Paper No. IMECE2005-81732, pp. 95-100; 6 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


This paper reports the development of MEMS metrology tools to characterize liquid and gaseous jets ejected from micro/nanofabricated nozzles. To date few highly local measurements have been made on micro/nanojets, due in part to the lack of characterization tools and techniques to investigate their characteristics. Atomic force microscope cantilevers are well-suited for interrogating these flows due to their high spatial and temporal resolution. In this work, cantilever sensors with either integrated heating elements or piezoresistive elements have been fabricated to measure thrust, velocity, and heat flux characteristics of micro/nanojets.

Copyright © 2005 by ASME



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