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Noise Studies in Implanted Piezoresistors

[+] Author Affiliations
Andrew A. Davenport, Paul Lim, Beth Pruitt

Stanford University

Paper No. IMECE2005-81590, pp. 87-93; 7 pages
doi:10.1115/IMECE2005-81590
From:
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME

abstract

Noise in piezoresistors can be divided into two types: Johnson or white noise and 1/f noise. Johnson noise is uniform across all frequencies and depends on the resistance and temperature. 1/f noise is a conductance fluctuation that has been shown to be related to piezoresistor fabrication parameters such as anneal temperature and surface effects. This study presents a collection of controlled piezoresistor fabrication runs with associated noise data and design rules and operation conditions for noise reduction in piezoresistors.

Copyright © 2005 by ASME

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