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Raman Thermometry of an Electro-Thermal Microactuator

[+] Author Affiliations
Sean P. Kearney, Leslie M. Phinney, Michael S. Baker

Sandia National Laboratories

Paper No. IMECE2005-79615, pp. 65-70; 6 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Experimentally measured temperature profiles along the micron-scale beam of a working thermal actuator are reported for the first time. Using a surface Raman scattering technique, temperature measurements are obtained in a noncontact fashion with submicron spatial resolution and to within an uncertainty of better than ±10 K. The experimental data are used to validate computational predictions of the actuator thermal performance with reasonable agreement between the data and predicted temperatures.

Copyright © 2005 by ASME



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