Full Content is available to subscribers

Subscribe/Learn More  >

3D Micro-Metrology Using a Nanofocus X-Ray Source

[+] Author Affiliations
Arlyn Antolak, Daniel Morse, Georg Aigeldinger, Joseph Ceremuga

Sandia National Laboratories

Paper No. IMECE2005-79601, pp. 59-63; 5 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Metrology applied to microsystems accelerates yield improvement and sustains performance at all stages of processing thereby ensuring manufacturability. One measure of the manufactured part quality in micro-structures, e.g., microfluidic channels or LIGA-fabricated parts and assemblies, is the side-wall verticality and/or curvature. In this paper, we report on initial investigations to directly obtain three-dimensional metrological information with micron-scale spatial resolution. Using a lab-based nanofocus x-ray source (0.5 micron spot size), samples a few millimeters in diameter can be examined with high volumetric resolution by collecting thousands of (tomographic) projections. Following reconstruction of the projection data, dimensional information is extracted directly from the object’s 3D rendering. A test part was used to verify and optimize the tomographic inspection process, and the application of this method to a LIGA-fabricated part is presented.

Copyright © 2005 by ASME
Topics: X-rays , Metrology



Interactive Graphics


Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In