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A Metrological Traceability System for Microflowrate Measurement

[+] Author Affiliations
C.-T. Yang, W.-T. Lin, F.-R. Yang, C.-C. Feng

Industrial Technology Research Institute

Paper No. IMECE2005-79443, pp. 53-57; 5 pages
  • ASME 2005 International Mechanical Engineering Congress and Exposition
  • Microelectromechanical Systems
  • Orlando, Florida, USA, November 5 – 11, 2005
  • Conference Sponsors: Microelectromechanical Systems Division
  • ISBN: 0-7918-4224-X | eISBN: 0-7918-3769-6
  • Copyright © 2005 by ASME


Applications of MEMS have prompted the design and manufacture of fluidic devices for sub-microliter fluid flow measurement. The accuracy of flowrate in terms of traceability and repeatability provides key information for successful micro-fluidics applications. To establish a measurement standard for microflow sensors and microflow controller for liquid handling and microfluidic monitoring, a traceable measurement system at Taiwan’s NMI has been sponsoring since 2002. The applied approaches included a gravimetric approach, a virtual piston approach, and a velocity-based approach. The expected flowrate ranges from 10 mL/min down to 10 nL/min, and the measurement uncertainty is evaluated. In this paper, the gravimetric approach and the chip based volumetric approach were demonstrated of their measurement setup and capability.

Copyright © 2005 by ASME



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