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Demonstrating the Potential of a Hybrid Model to Increase the 360 Degrees Rotational Motion Freedom of Ironless Permanent Magnet Planar Motors

[+] Author Affiliations
Ding Yuan, Ming Zhang, Yu Zhu, Xin Li, Leijie Wang

Tsinghua University, Beijing, China

Paper No. IMECE2018-87007, pp. V010T13A007; 7 pages
doi:10.1115/IMECE2018-87007
From:
  • ASME 2018 International Mechanical Engineering Congress and Exposition
  • Volume 10: Micro- and Nano-Systems Engineering and Packaging
  • Pittsburgh, Pennsylvania, USA, November 9–15, 2018
  • Conference Sponsors: ASME
  • ISBN: 978-0-7918-5215-6
  • Copyright © 2018 by ASME

abstract

The ironless permanent magnet planar motors (IPMPMs) are used in the lithography machine to realize long stroke x, y translation with single mover. The lack of rotation motion limits its use in a wide range of applications. This paper proposes a hybrid model for the IPMPM to realize the rotational motion. Based on the decoupling feature, the influence cause by the x, y translation and the rotation can be expressed by the position functions and 1-d lookup table (LUT) respectively. To the coils with centro-symmetry, the hybrid model can be further simplified. Then simulations about the calculation speed and the model accuracy are conducted. Compared with the 3-d LUT, the hybrid model cost less time with relative high accuracy. Finally the validity of the hybrid model is verified by experiment.

Copyright © 2018 by ASME

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