0

Full Content is available to subscribers

Subscribe/Learn More  >

Optimization of an Interferometric Pressure Sensor for Intraocular Pressure Measurements

[+] Author Affiliations
Alex Phan, Phuong Truong, Julian Trumpp, Frank E. Talke

University of California San Diego, La Jolla, CA

Paper No. ISPS-MIPE2018-8562, pp. V001T05A004; 3 pages
doi:10.1115/ISPS-MIPE2018-8562
From:
  • ASME-JSME 2018 Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment
  • ASME-JSME 2018 Joint International Conference on Information Storage and Processing Systems and Micromechatronics for Information and Precision Equipment
  • San Francisco, California, USA, August 29–30, 2018
  • Conference Sponsors: Information Storage and Processing Systems Division
  • ISBN: 978-0-7918-5193-7
  • Copyright © 2018 by ASME

abstract

This paper studies the effect of thin film thickness on visibility readout from an interferometric pressure sensor. Interference fringes between a silicon nitride diaphragm and a glass substrate are formed as a function of pressure and can be captured using a camera. Image processing software was used to analyze and correlate the fringe pattern to pressure. Visibility of the interference fringes is optimized by depositing a thin silicon nitride layer on the glass substrate of the sensor using plasma enhanced chemical vapor deposition (PECVD). Optimal visibility was obtained with a coating thickness of 79 nm. Visibility was increased by 150% in comparison to no coating.

Copyright © 2018 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In