0

Full Content is available to subscribers

Subscribe/Learn More  >

Deflection Control of Electrostatically Actuated Micro Cantilevers via Fuzzy Controller

[+] Author Affiliations
Mohammad Khadembashi, Hamid Moeenfard

Ferdowsi University of Mashhad, Mashhad, Iran

Amir H. Ghasemi

University of Michigan, Ann Arbor, MI

Paper No. DSCC2016-9838, pp. V001T01A010; 10 pages
doi:10.1115/DSCC2016-9838
From:
  • ASME 2016 Dynamic Systems and Control Conference
  • Volume 1: Advances in Control Design Methods, Nonlinear and Optimal Control, Robotics, and Wind Energy Systems; Aerospace Applications; Assistive and Rehabilitation Robotics; Assistive Robotics; Battery and Oil and Gas Systems; Bioengineering Applications; Biomedical and Neural Systems Modeling, Diagnostics and Healthcare; Control and Monitoring of Vibratory Systems; Diagnostics and Detection; Energy Harvesting; Estimation and Identification; Fuel Cells/Energy Storage; Intelligent Transportation
  • Minneapolis, Minnesota, USA, October 12–14, 2016
  • Conference Sponsors: Dynamic Systems and Control Division
  • ISBN: 978-0-7918-5069-5
  • Copyright © 2016 by ASME

abstract

The objective of this paper is to develop a novel two-level supervised fuzzy controller to stabilize the response of electrostatically actuated microbeams beyond their pull-in range. To this end, Lagrange equations are utilized to derive the differential equations governing the dynamic behavior of the system. To investigate the possibility of using a passive control strategy, the static behavior of the system is studied in detail. Through some open loop simulations, the qualitative and quantitative dependence of the beam deflection to the applied voltage and system parameters are studied. Based on the understanding obtained from these studies, a single level fuzzy controller is designed to control the response of the microstructure. In order to enhance the performance of the closed-loop system, another higher level supervisory fuzzy controller is designed to tune the maximum allowable voltage the lower level controller can apply. Simulation results reveal that both single level and multi-level fuzzy controllers can extend the travel range of the microbeams beyond its pull-in range. However the rise time, overshoot and settling time in the multilevel controlled system is far better than that of a simple single level fuzzy controller. The novel controller presented in this paper can be applied in most intrinsically nonlinear nano/micro structures to help them to have more efficient regulations and command tracking maneuvers.

Copyright © 2016 by ASME

Figures

Tables

Interactive Graphics

Video

Country-Specific Mortality and Growth Failure in Infancy and Yound Children and Association With Material Stature

Use interactive graphics and maps to view and sort country-specific infant and early dhildhood mortality and growth failure data and their association with maternal

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In